The purpose of this research is to develop an easy and rapid method to align and parallel nanowires on the patterned-substrates for the application of TiO{sub}2 nanowires field effect transistors (NWFET) biosensors. Titanic oxide nanowires, which the average diameter and length of prepared nanowires are about 20 to 30 nm and 3 μm, respectively, is made base on the simple hydrothermal synthesis method. The energy band gap of the TiO{sub}2 at anatase structure is about 3.33 eV. The vibration and stretching of the specific functional groups are presented at wavenumber 395, 514 and 638 cm{sup}(-1) under Raman spectroscopy measurement. The homemade robot system is designed to pull the substrate up from hydrogen titanate solution. Paralled-TiO{sub}2 nanowires are formed via gravity effect and the channel alignment on the substrate surface. In this paper, the key factors such as robot speed, channel structures and nanowire concentration are studied and discussed. The assembly method of the devices and the modification of the nanowires are also mentioned in final.
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