Three dimensional micro-mechanical and micro-optical devices fabricated by holographic two-photon lithography

摘要

Holographic two-photon lithography (HTPL) is a high speed parallel laser fabrication technique inside photosensitive materials based on spatial light modulation and two-photon polymerization. In this paper, a femtosecond HTPL system was built and femtosecond laser beam was modulated to multi beams with spatial light modulator (SLM). The quantity and the distribution of the multi foci can be well adjusted according to our design. On this basis, parallel fabrication of high precision micro-mechanical and micro-optical devices, which has promising application in MEMS, micro-optics, micro-sensors and so on, was demonstrated. This technique will contribute to the industrialization of femtosencd two-photon polymerization (FTPP) in the foreseeable future.