AlN Contour Mode Resonators with Half Circle Shaped Reflectors

摘要

AIN contour mode resonators (CMRs) with half circle shaped reflectors are designed to reduce the anchor loss. In this work, we use finite element analysis (FEA) and demonstrate that the half circle shaped reflector can effectively reduce the energy dissipation through the anchor to the plate, and then boost the CMR quality factor Q. Furthermore, the measured experimental data of AIN CMR with half circle shaped reflectors design yields a Q of 1605 operating at the resonance of around 400 MHz, which provides over 80% improvement compared to an AlN CMR with a normal plate configuration.