High-resolution noncontact electrostatic voltage meter based on microsensor chip**

摘要

Electrostatic voltage is a vital parameter in industrial production lines for reducing electrostatic discharge harms and improving yields. Due to such drawbacks as package shielding and low resolution, previously reported electric field microsensors are still not applicable in industrial lines. In this paper, we introduce a new designed microsensor package structure which enhances the field strength inside the package cavity remarkably. This magnification effect is studied and optimized by both theoretical calculation and ANSYS simulation. By means of digital synthesizer and digital coherent demodulation method, the compact signal processing circuit for the packaged microsensor is developed. The meter protype is calibrated above a charged metal plate, and the measuring error is less than 1V from -1kV to 1kV in 2.5 centimeters distance. The meter is also installed into a production line and shows good consistency with and better resolution than a traditional vibratory capacitance sensor.