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A Novel Conductive Particle Dispersing Method via EHDA for POB-COG Packaging

机译:一种通过EHDA进行POB-COG包装的新型导电颗粒分散方法

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With the continuous evolving of Liquid Crystal Display (LCD) panels and Integrate Circuits, conventional Anisotropic Conductive Film (ACF) has confronted with two paradoxical requirements: higher conductive particle density, while avoid serious aggregation. To solve this problem, a wafer level pretreatment technique, Particle on Bumps (POB), was proposed to renovate the usual Chip on Glass (COG) technology. Although we have demonstrated its feasibility and reliability, a fundamental route towards fully accomplishing the POB technique still needs to be paved out, that is the dispersing of conductive particles. Herein we introduced the method of Electrohydrodynamic Atomization (EHDA). EHDA is a technique which ultra-fine droplets can be induced due to electrical force. We build up a prototype apparatus for particle dispersing. With the help of high speed camera, we are able to verify certain behaviors and characteristics of different modes during the EHDA process. The deposition patterns generated under different spraying modes are observed and compared; the stable cone jet mode is therefore chosen as the operational state during our following deposition process. We investigate the connections between onset voltage and relevant spray parameters to optimize our EHDA configurations. By implementing the particle dispersing experiment via stable cone jet EHDA, we successfully obtained a pattern with high densely and uniformly distributed particles.
机译:随着液晶显示(LCD)面板和集成电路的不断发展,传统的各向异性导电膜(ACF)面临两个矛盾的要求:更高的导电颗粒密度,同时避免严重的聚集。为了解决这个问题,提出了一种晶圆级预处理技术,即“凸点上的颗粒”(POB),以革新常规的玻璃上芯片(COG)技术。尽管我们已经证明了它的可行性和可靠性,但是仍然需要为完全实现POB技术铺平一条根本之路,那就是分散导电颗粒。在这里,我们介绍了电动流体雾化(EHDA)的方法。 EHDA是一种可以由于电场力而产生超细液滴的技术。我们建立了用于分散颗粒的原型设备。借助高速摄像头,我们能够在EHDA过程中验证不同模式的某些行为和特征。观察并比较在不同喷涂模式下产生的沉积模式;因此,在我们随后的沉积过程中,选择稳定的锥喷射模式作为工作状态。我们调查起始电压和相关喷雾参数之间的关系,以优化我们的EHDA配置。通过稳定的锥形射流EHDA进行颗粒分散实验,我们成功地获得了具有高密度和均匀分布的颗粒的图案。

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