CMOS Monolithic Airborne-Particulate-Matter Detector Based on 32 Capacitive Sensors with a Resolution of 65zF rms

摘要

The adverse impact on human health of the exposure to airborne particulate matter (PM) is well known [1]. Although optical and gravimetric instruments are available to detect PM, they lack portability, have poor potential for miniaturization, and are not low cost. Instead, a better spatio-temporal resolution in PM monitoring by means of portable networked sensors would allow significant enhancements in terms of modeling and prediction capabilities and elucidation of subtle toxicological pathways [2].