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Consequence on Optical Properties of ZnS Thin-Film Deposited by RF Magnetron Sputtering with Varying Substrate Temperatures

机译:ZNS薄膜光学性质的结果,RF磁控溅射沉积,具有不同的基板温度

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Earth abundant and ecofriendly zinc sulphide (ZnS) is a direct wide band gap semiconductor material and applications of ZnS thin-films cover a large area including optoelectronic devices. As thin-films of ZnS are highly defective depending on fabrication process, prior to final target applications, properties of thin-films should be studied first. This study was motivated to apply ZnS thin-film as an alternative buffer layer in a chalcogenide based multilayer thin-film solar cell (TFSC) e.g. CZTS using a reliable and clean deposition technique. This study reports mainly on optical properties of ZnS thin-films with varying substrate temperatures. ZnS thin-films were deposited on soda lime glass (SLG) substrates using radio frequency (RF) magnetron sputtering. Room temperature (RT), 150° C, 300° C were taken as substrate temperature variants with RF power and argon (Ar) flow rate remained fixed at 100W and 20 SCCM respectively for all depositions. Structural properties were confirmed by XRD and optical properties were probed by UV-Vis NIR spectroscopy. It was found from structural studies that most of the films were crystallographically cubic type lattice, oriented along (111) plane with Bragg's diffraction angle at 28.95°. The average optical transmittance were found around 87% (invisible and near infrared regions of spectrum). The optical band gaps as obtained were in decreasing nature from 3.96eV to 3.71eV as substrate temperature increased from room temperature to 300°C, were in good agreement with Urbach energy analysis. Although the findings of optical properties are potentially positive, prior to apply ZnS thin-film as a buffer layer in full TFSC fabrication, more investigations will be required on electrical and morphological properties with the same investigated recipe.
机译:地球丰富和生态友好的硫化锌的(ZnS)是直接宽带隙半导体材料和ZnS的应用薄薄膜覆盖大的区域,包括光电子器件。如硫化锌的薄薄膜是高度缺陷取决于制造工艺中,最终的目标应用程序之前,薄薄膜的属性应该被首先研究。这项研究的动机申请的ZnS薄膜,如硫族化物的基于多层薄膜太阳能电池(TFSC)例如一个替代缓冲层使用可靠和清洁的沉积技术CZTS。本研究中主要报道对ZnS薄薄膜具有不同的衬底温度下的光学特性。的ZnS薄膜沉积在使用射频(RF)磁控溅射的钠钙玻璃(SLG)衬底。室温(RT),150℃,300℃下作为衬底温度与RF功率和氩变体(Ar)流量率保持固定在100W和20 SCCM分别为所有沉积。结构性质通过XRD证实和光学性质通过UV-Vis近红外光谱探测。它是从结构的研究,大多数的膜的均晶体立方晶格型,沿(111)与布拉格衍射角平面定向在28.95°找到。平均光透射率87%左右实测值(不可见和近光谱的红外区域)。作为获得的光学带隙是在从3.96eV性质降低到3.71eV作为基板温度从室温升高至300℃,分别在与Urbach能分析完全一致。虽然光学特性的调查结果是潜在的正,以应用现有的ZnS薄膜,如全TFSC制造的缓冲层,更多的调查将需要在具有相同配方调查电和形态学特性。

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