DIGITAL LITHOGRAPHY MASKING METHOD ON FABRICATION OF PRECISE UNIFORM MICRO-FEATURE ARRAY WITH 16 μm RESOLUTION

摘要

Current demands in various industries such as electronics, optics, aerospace, and biotechnology need manufacturing process that can fabricate micro-parts. Micro-feature fabrication requires reliable and repeatable methods [1]Protein microarrays constitute a significant tool for studying biomolecular. One of it type is microwell chip. They consist of spatially arranged protein spots immobilized usually on planar surfaces. The most common industrially accessible fabrication method of protein microarrays is based on attachment of proteins on chemically derivatized glass slides [2], where protein solutions are delivered by means of high-precision printing robots [3].