PLASMONIC NANO-LITHOGRAPHY MACHINE (PNLM)

摘要

The goal of the current research project is to design, manufacture, assemble and calibrate a state of the art plasmonic imaging lithography machine. This project is a result of the cooperation between the "Center for Precision Metrology" (CPM) located at University of North Carolina at Charlotte and the Center for Scalable and Integrated NanoManufacturing (SINAM) located at University of California at Berkeley.