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Low Temperature Crystallization Technology of Extremely Thin TCO for Next Generation Panels

机译：下一代面板的TCO极薄的低温结晶技术

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Recently, realization of high-performance transparent conductive oxide (TCO) film is required, due to the trend of high-performance small and middle size panel (mainly represented by smart phone and tablet pc). We hereby report the crystallization technology of extremely thin TCO that realized high transmittance and low resistance through low-temperature deposition.

机译：近年来，由于高性能中小尺寸面板（主要以智能手机和平板电脑为代表）的趋势，需要实现高性能透明导电氧化物（TCO）膜。我们特此报告极薄的TCO的结晶技术，该技术通过低温沉积实现了高透射率和低电阻。

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《International display workshops》|2012年|559-561|共3页
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Tomiyuki Yukawa; Masaki Takei; Youhei Oono; Atsushi Ota; Makoto Arai; Junya Kiyota; Satoru Ishibashi; Kazuya Saito;
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关键词
ITO; Low temperature deposition; flexible; crystallization;

机译：ITO;低温沉积;灵活;结晶;

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1. High performance low temperature metal-induced unilaterally crystallized polycrystalline silicon thin film transistors for system-on-panel applications [J] . Zhiguo Meng, Mingxiang Wang IEEE Transactions on Electron Devices . 2000,第2期

机译：用于面板上系统的高性能低温金属诱导的单晶多晶硅薄膜晶体管
2. High-performance polycrystalline silicon thin-film transistor technology using low-temperature metal-induced unilateral crystallization [J] . Man Wong, Hoi S. Kwok Microelectronics journal . 2004,第4期

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3. Digital X-Ray Flat Panel Housing for Operation at Extremely Low Temperatures [J] . Fedor Simankin, Jan Miciński, Evgeniy Shumnyi, Materials science forum . 2019,第期

机译：数字X射线平板显示器外壳，可在极低的温度下运行
4. Low Temperature Crystallization Technology of Extremely Thin TCO for Next Generation Panels [C] . Tomiyuki Yukawa, Masaki Takei, Youhei Oono, International display workshops . 2012

机译：下一代板极其薄的TCO低温结晶技术
5. Metal-induced unilaterally crystallized polycrystalline silicon thin-film transistor technology and application to flat-panel displays. [D] . Meng, Zhiguo. 2002

机译：金属诱导的单晶结晶多晶硅薄膜晶体管技术及其在平板显示器上的应用。
6. Extremely rapid acclimation of Escherichia coli to high temperature over a few generations of a fed-batch culture during slow warming [O] . Stéphane Guyot, Laurence Pottier, Alain Hartmann, 2014

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7. Development of Extremely Thin Wall Injection Molding Technology for Instrument Panel Skin [O] . Takeshi Nagao, Atsushi Mizutani, Kaoru Ishii, 2014

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Low Temperature Crystallization Technology of Extremely Thin TCO for Next Generation Panels

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