process for zuechten of thin, weak doped homogeneous epitaktischen siliziumschichten at low temperatures, particularly for the manufacture of uebergaengen with extremely low resistance in stream

摘要

1,148,409. Epitaxial silicon deposition. INTERNATIONAL BUSINESS MACHINES CORP. 20 Oct., 1966 [21 Oct., 1965], No. 46895/66. Heading C1A. [Also in Divisions C7 and H1] An epitaxial Si layer is grown on a Si substrate by depositing Si and Al thereon (e.g. by evaporation of an Al or Si alloy on successive layers of Al and Si) and heating the coated base at a temperature below the Al-Si eutectic temperature to cause a crystalline Si layer to grow on the substrate surface (e.g. at 565‹ C.).