HOW TO PREPARE REPRODUCIBLE, HOMOGENEOUS, AND HYDROLYTICALLY STABLE AMINOSILANE-DERIVED LAYERS ON SILICA

摘要

This is a comprehensive evaluation of commercially available aminosilanes for the preparation of reproducible, homogeneous, and hydrolytically stable silane layers on silicon wafers using solution-phase as well as vapor-phase silanization methods. The vapor-phase approach eliminates the need for silane purification and generates more reproducible results compared to silanizations carried out in solution. Among the three groups of aminosilanes, AEAPTES, a triethoxysilane in G2, is able to generate the most stable monolayers in the vapor phase due to its uniaue structural features.