Prediction of 5-DOF Motion Errors of Hydrostatic Bearing Tables and Its Experimental Verification

摘要

In precision feed tables such as aerostatic or hydrostatic tables, 5-DOF motion errors are largely affected by the profile errors of guide rails. To get the target precision of the feed tables, final finishing process by the skilled workers is normally required and it is time consuming and iterative process. If it is possible to predict the motion errors of the table from the rail profiles, the allowable tolerance of the rail profile can be defined in a design step and also the time for finishing process can be reduced drastically.