Low loss LTCC (Low Temperature Cofired Ceramics) materials have already demonstratedtheir virtues for high density packaging of mm-wave modules and their capability to handle the inherentrequirements of heat dissipation. A 60 GHz substrate integrated waveguide fed steerable antennaarray is one example of the driving applications for new challenges in the LTCC process. This antennais suitable for transmit and receive in the 60 GHz WPAN frequency band [1]. Integrating antennaarray and mm-wave front-end in one module is a consequent way to avoid amplitude andphase uncertainties associated with connectors and cables. A compact module also helps to reducelosses in the signal path by providing short interconnects. This is important for mm-Wave systems,particularly for the receiver. The antenna design presented here requires a three-dimensional surfacestructure with features like small and precise cavities and grooves. Different methods to fabricatecavities in LTCC modules will be discussed and a new method which proved suitable for the demandingapplication will be presented in detail.
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