Transfer technology of pyrolyzed polymer onto low thermal tolerance substrate

摘要

This paper reports a novel process for transfer of a pyrolyzed polymer even onto a low thermal tolerance substrate such as polymer films. Conventionally, it was difficult to form pyrolyzed polymer on low thermal tolerance substrate because of high annealing temperatures for transforming dielectric poymer to conductive materials. We successfully demonstrated formation of a pyrolyzed polymer on a polymer film. In terms of applications, the formation of metal patterns such as Au electrodes with the transferred pyrolyzed polymer becomes essential. Thus, we propose a process for transfer of the Au/pyrolyzed polymer combined layer. Materials and thickness of barrier layers, process parameters of post-annealing and surface activation are investigated to ensure the proposed transfer process.