MEMS-based buoyancy and propelling mechanisms for a micro-submarine

摘要

In this work, we developed a MEMS-based micro-submarine which the thermopneumatic mechanism is used to control the movement of sink and float. The equivalent circuit model of the thermopneumatic mechanism is formulated. The analytical solution for predicting the buoyancy of the submarine is also derived. A propelling method is also proposed. The dimensions of the micro-submarine are 2.29 mm × 3.70 mm × 0.71 mm. The micro-submarine motion of sinking, floating and moving forward are also demonstrated.