An optimized design of a MEMS-based phase shifter cell based on an equivalent circuit model is presented. The optimization is performed by controlling five key design parameters of the unit cell which are: the number of MEMS switches, their state (ON/OFF), their appropriate location inside the slot, their ON/OFF capacitances and whether they should be used singly or in a pair. By controlling and regulating these parameters through the equivalent electrical circuit, the design of the phase shifter cell can be optimized. This optimization process results in phase shifter configurations that permit a 360° phase range along with the required number of linearly distributed phase states. Minimization of power losses within the unit cell is the main issue addressed in this article.
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