Simple fabrication process for thickness-tunable GMR biosensor

摘要

This work demonstrates a simple fabrication process for the guided-mode resonance biosensors with tunable thickness. Although consisted of the waveguide layer and the grating layer, the GMR biosensor can be simply fabricated in single step and of the same material by the conventional embossing technique. Moreover, the thickness of waveguide can be well controlled by applying various embossing force in process. It is shown that the tunable range of the thickness approximately to 12.5%, however still to keep the deformation on the grating layer less than 10%. The whole fabrication process can be as quick as lesser than 10 minutes.