BaCe_(0.8)Zr_(0.1)Y_(0.1)O_(3-α) Thin Film Elaborated by Reactive Magnetron Sputtering

摘要

BaCe_(0.8)Zr_(0.1)Y_(0.1)O_(3-α) protonic conductor coatings were co-sputter deposited from Ba, Zr and Ce_(0.9)Y_(0.1) metallic targets in argon-oxygen reactive gas mixtures. The targeted composition of the coatings is obtained by fixing the discharge current applied on Zr and Ce_(0.9)Y_(0.1) targets and adjusting the discharge current applied on Ba target. As deposited coatings are amorphous and present a good chemical stability against carbonation under air up to 573 K. The coatings crystallise after annealing treatment around 873 K for 2 hours under air in a mixture of BaCO_3 and CeO_2 in spite of the targeted double substituted BaCeO_3 perovskite structure. Nevertheless, the crystallization in the convenient perovskite structure was obtained after annealing treatment under vacuum (5 ×10~(-3) Pa) at 873 K. during 2 hours to prevent the carbonation of the coating. Such crystallized coatings kept mainly their initial morphological properties.