The Online Measuring System for the Circular Pitch Error of Hob Chip Pocket

摘要

Aimed at no suitable online measuring instrument for circular pitch error of hob chip pocket, a new online measuring system using the half bridge inductive sensor DGC-6PG/A is put forwards into application in this paper. Measuring method and the structure of measuring system is introduced. Basing on making use of integrated signal conditioning circuit and Δ-Σ Analog-to-Digital converter, the system has combined high speed over sampling method and average filtering method to fulfill the high precision measurement of circular pitch sub-micron error. Experimental data according the adoption of inductive sensor and integrated signal conditioning circuit proves that stability performance better than ±0.01μm when sampling speed is limited under 100 Hz. So this online measuring system has high precision and lowers the surveyors'' complex work.