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Focused Laser Spike Dewetting for Metrology of Thin Films

机译:聚焦激光尖峰脱模用于薄膜计量

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Focused laser spike (FLaSk) dewetting utilizes thermocapillary shear forces generated by laser-induced extreme thermal gradients to move molten materials down thermal gradients. Past work, which has focused on the patterning potential of this technique, demonstrated that evolution of the driven dewetting patterns formed by FLaSk is highly sensitive to not only the parameters of the laser, but also to specific parameters of the dewetted material. The most significant effects tie to the melt viscosity. This talk will discuss the use of FLaSk as a tool to probe factors that affect the viscosity of the melt, including surface modification, crystallization, and phase separation. The key advantage to this approach is that a single FLaSk "experiment," consisting of a point-exposure with a controlled set of parameters, can occur on a sub-mm or even sub-micron region independently from other FLaSk experiments. Therefore, a mm-patch of material can contain hundreds to millions of experimental conditions. By using a calibrated heating substrate, the thermal conditions of the different exposure profiles can be well characterized. Further, optical analysis techniques can lead to high-throughput evaluation of the results.
机译:聚焦激光尖峰(烧瓶)脱模利用激光诱导的极端热梯度产生的热涂层力,以使熔融材料下载热梯度。过去的工作,它专注于该技术的图案化电位,证明了由烧瓶形成的驱动的脱水图案的演变对不仅对激光的参数高度敏感,而且对脱浸材料的特定参数非常敏感。最显着的影响与熔体粘度有关。该谈话将讨论使用烧瓶作为影响熔体粘度的探测因子的工具,包括表面改性,结晶和相分离。这种方法的关键优点是由具有受控参数的点曝光组成的单个烧瓶“实验”,可以独立于其他烧瓶实验在亚mm或甚至亚微米区域上发生。因此,MM型材料可以包含数百至数百万的实验条件。通过使用校准的加热基板,可以很好地表征不同曝光型材的热条件。此外,光学分析技术可以导致结果的高通量评估。

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