首页> 外文会议>Conference on micro-optics >Self induced Patterning of PDMS Structures by surface-charge lithography driven by photorefractive effect
【24h】

Self induced Patterning of PDMS Structures by surface-charge lithography driven by photorefractive effect

机译:通过光折射效应驱动的表面电荷光刻技术对PDMS结构进行自感应图案化

获取原文
获取外文期刊封面目录资料

摘要

Direct patterning of Polydimethylsiloxane (PDMS) thin film is demonstrated. A procedure is implemented to induce PDMS self-patterning in one and two dimensional geometries based on surface-charge lithography by means of the photorefractive properties of iron doped Lithium Niobate (LN) crystal. Linear periodic and radial arrays of micro-channels are fabricated by changing the wettability on the LN crystal surface. The substrate is x-cut Fe+ doped LN crystal, the covering substance is PDMS. Fabrication process is divided in three stages: PDMS spinning on the substrate, PDMS reshaping and PDMS curing. After spinning step the sample is inserted in an optical setup. We employ an Argon laser whose wavelength is 514nm. Light passes trough an amplitude grating that is imaged by a lens. The sample is positioned in the conjugate plane of the grating. Light impinging on the lower LN surface is spatially inhomogenous and excites the charge carriers inside the crystal. The space-charge field generate inside the material modulate the refractive index via electro-optic effect and cause lateral forces near the upper surface able to manipulate and trap liquids. PDMS moves on the crystal surface trapping itself and gathering up in stripes to form geometries with the same period of the phase grating written inside the crystal.While the light source generate the PDMS structure, a thermal treatment applied to the crystal, induces the cross-linking of the PDMS, leading to a stable and reliable PDMS pattern. We propose an alternative one step patterning process based on light driven self assembly.
机译:证明了直接对聚二甲基硅氧烷(PDMS)薄膜进行构图。借助铁掺杂铌酸锂(LN)晶体的光折变特性,实现了一种基于表面电荷光刻技术在一维和二维几何形状中诱导PDMS自构图的过程。通过改变LN晶体表面的可湿性来制造微通道的线性周期和径向阵列。衬底是x切Fe +掺杂的LN晶体,覆盖物质是PDMS。制造过程分为三个阶段:PDMS在基板上旋转,PDMS重塑和PDMS固化。纺丝步骤后,将样品插入光学装置中。我们使用波长为514nm的氩激光器。光通过透镜成像的振幅光栅。样品位于光栅的共轭平面上。入射在LN下部表面上的光在空间上是不均匀的,并激发晶体内部的电荷载流子。材料内部产生的空间电荷场通过电光效应调节折射率,并在上表面附近产生横向力,从而能够操纵和捕获液体。 PDMS在晶体表面上移动,从而自身陷获并聚集成条纹,形成几何形状,与写入晶体内部的相位光栅的周期相同。 在光源产生PDMS结构的同时,对晶体进行热处理会引起PDMS的交联,从而产生稳定可靠的PDMS图案。我们提出了一种基于光驱动自组装的替代性一步式构图工艺。

著录项

相似文献

  • 外文文献
  • 中文文献
  • 专利
获取原文

客服邮箱:kefu@zhangqiaokeyan.com

京公网安备:11010802029741号 ICP备案号:京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有
  • 客服微信

  • 服务号