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Simultaneous determination of carrier lifetime and net dopant concentration of silicon wafers from photoluminescence

机译:同时测定硅晶片的载流子寿命和净掺杂浓度

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A simultaneous determination of injection dependent minority carrier lifetime and net dopant concentration in crystalline silicon wafers from quasi-steady-state photoluminescence (QSSPL) is theoretically derived and experimentally implemented. The time shift between maxima of a time modulated irradiation intensity and the respective photoluminescence intensity is linked to effective minority carrier lifetime. In addition, the ratio of peak curvatures of irradiation intensity and photoluminescence intensity reveals the net dopant concentration of the respective material. Thus, we found a luminescence based technique to determine injection dependent minority carrier lifetime in silicon wafers, which requires a priori information neither about carrier mobilities nor about net dopant concentration.
机译:从准稳态光致发光(QSSPL)同时确定和注入取决于注入的少数载流子寿命和晶体硅晶片中的净掺杂剂浓度是从理论上推导和实验实现的。时间调制的辐射强度的最大值与相应的光致发光强度之间的时间偏移与有效少数载流子寿命相关。另外,辐射强度和光致发光强度的峰曲率之比揭示了相应材料的净掺杂剂浓度。因此,我们发现了一种基于发光的技术来确定硅晶片中注入依赖的少数载流子寿命,该技术既不需要有关载流子迁移率也不需要有关净掺杂剂浓度的先验信息。

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