Optomechanical transduction of a silicon cantilever probe intended for atomic force microscopy applications is achieved through gradient force coupling to a high quality factor microdisk cavity, with an estimated displacement sensitivity of ≈ 3×10−15 m/√Hz.
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机译:通过将梯度力耦合到高质量因子微盘腔上,实现了用于原子力显微镜应用的硅悬臂探针的光机械转换,估计位移灵敏度为≈3×10 −15 sup> m /√Hz 。
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