Optomechanical transduction of a silicon cantilever probe intended for atomic force microscopy applications is achieved through gradient force coupling to a high quality factor microdisk cavity, with an estimated displacement sensitivity of ≈ 3×10−15 m/√Hz.
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机译:用于原子力显微镜应用的硅悬臂探针的光学机械转导通过梯度力耦合到高质量因子微仪腔而实现,估计位移灵敏度为≈3×10 -15 sup> m /√hz 。
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