Flexible carbon nanotubes photosensor array

摘要

This study reports a flexible CNTs (carbon nanotubes) photosensor array for light detection. In this device, the CNTs for light detection are embedded into the flexible Parylene-C film. The batch fabricated flexible CNTs photosensor array using the micromachining processes is implemented. The measurements show the output photocurrent varies linearly with the input light intensity. Moreover, the quantum efficiency of CNTs is about 0.063% in atmospheric pressure, and becomes 1.93% in vacuum of 3mTorr. In summary, the sensitivity of presented device can be further increased for 2 orders by vacuum package. Finally, the position detection of light beam using presented device has also been demonstrated.