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Novel method for the assembly and electrical contacting of out-of-plane microstructures

机译:平面外微结构的组装和电接触的新方法

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This paper reports on the assembly of out-of-plane microstructures with multiple electrical contacts established at the same time. The reported structures are intended for neuroscientific applications. Dedicated bays in a platform ensure the orthogonal orientation of the microstructure. In addition, a 10-¿m-thick polymer cable is clamped between bays and microstructures and establishes the fixation of the probes. This cable, enhanced by gold bumps, ensures the transfer of conducting lines from the horizontal into the vertical direction. It simultaneously provides the electrical contacts to the microstructures. The contact resistance of individual contacts was found to be smaller than 2 ¿.
机译:本文报告了同时建立多个电触点的平面外微结构的组装情况。报告的结构旨在用于神经科学应用。平台上的专用托架可确保微结构的正交方向。此外,在托架和微结构之间夹有10 µm厚的聚合物电缆,并建立了探头的固定位置。通过金凸点增强的该电缆可确保将导线从水平方向转移到垂直方向。它同时提供与微结构的电接触。发现单个触点的接触电阻小于2μs。

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