Reconfigurable multivariable MEMS sensor array

摘要

Research into operational aspects of mini unmanned aerial vehicles (UAV) and structural health monitoring systems (SHM) is being conducted at the Defence Science and Technology Organisation and La Trobe University. A fundamental area of interest is investigating the problems associated with miniaturization of the control and health monitoring sensors for such systems. While many technologies for UAV and SHM systems can be, and have been, adapted from those currently available in large manned aircraft; cost, weight, and size constraints have prevented mini UAVs from including many of the robustness mechanisms common to larger aircraft. Moreover, the ubiquitous nature of the sensing requirements for SHM systems has limited their uptake, due mainly to the same issues of cost, weight and size. This paper details the design of a reconfigurable multivariable MEMS (Micro Electro Mechanical System) sensor array to address these issues. This array is comprised of multiple instances of identical sensors, which can be dynamically reconfigured to achieve the desired measurand(s) with tradeoffs against accuracy. The available measurands include such items as; accelerations, rotational rates, magnetic fields (all in X, Y and Z directions), temperature and pressure. This paper presents the design of a reconfigurable multivariable MEMS sensor array together with simulation results.