Raman piezo-spectroscopic investigation of microscopic residual stresses in Ni-MLCC devices

摘要

Residual stresses in Ni-MLCC were investigated by Raman microprobe piezo-spectroscopic (PS) methods. The shape of the Raman spectrum of BaTiO{sub}3 in Ni-MLCC depended on the angle between the polarizing direction of the incident laser beam and the direction of the internal electrode. From a set of precise calibrations, we show that the orientation dependence arises from the interaction between internal stresses and the polycrystalline microstructure; by taking into account such an orientation dependence, we were able to establish a technique for the measurement of the distribution of residual stresses in Ni-MLCC.