Preparation of Lithium Ion Conductive Li{sub}4.2Al{sub}0.2Si{sub}0.8O{sub}4 Thin Films Using Sol-Gel Process

摘要

Thin films of lithium ion conductive ceramic Li{sub}(4+x)Al{sub}xSi{sub}(1-x)O{sub}4 were fabricated on Au substrate using sol-gel process. The sol of Li-Al-Si-O was spread on Au substrate using a spin coater, and it was gelated at room temperature. The gel was calcinated at 400 °C and heat-treated at high temperatures between 500°C and 800 °C in air. The addition of poly(vinylpyrrolidone) (PVP) was effective in stabilizing the sol. Furthermore, the morphology of the obtained thin film was changed by the PVP additive. Li{sub}(4+x)Al{sub}xSi{sub}(1-x)O{sub}4 thin film prepared at 800 °C exhibited a Li{sup}+ ion conductivity of 10{sup}(-8) S cm{sup}(-1) at room temperature.