Design and Optimization of Flexure-Based Micro- manipulator for Optics Alignment

摘要

This paper presents the development of a novel flexure-based micromanipulator for the alignment of optical components (Figure 1). The realized device is based on a six-axis parallel mechanism and piezo-positioners using stick-slip principle and providing nanometre resolution. Results of this paper show that the flexure-based design allows realizing nanometre steps with the moving platform in all axes.