LASER OXIDATION MICROPATTERNING OF A POROUS SILICON BASED BIOSENSOR FOR MULTIANALYTES MICROARRAYS

摘要

In this communication, we present the fabrication and characterization of oxidized porous silicon (PSi) micropattems, obtained by direct laser writing, and chemically functionalized for biological applications. The laser local oxidation technique is a good alternative to the traditional photolithographic process since this approach allows the development of micropattemed biosensors. In fact, from a technological point of view, the standard maslomg of PSi by means of photoresist presents remarkable difficulties because of the low resistance to the electrochemical process. The micropattemed PSi oxidized surfaces can be properly functionalized by a specific chemical linker. The modified surface is able to link the carboxylic or aminic groups of biological probes. The binding between the functionalized surface and the biological matter has been tested by directly spotting on the PSi local oxide a fluorescent labelled antibody. The device has been characterized by FT-IR measurements and fluorescence macroscopy.