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Preparation of high quality CuIn1-xGaxSe2 thin films by modified selenization procedure of sequential sputtering metallic precursors

机译:通过顺序溅射金属前驱体的改进硒化工艺制备高质量的CuIn 1-x Ga x Se 2 薄膜

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Chalchopyrite CIGS thin films were prepared by the two-stage growth technique. The processes were based on the controlled selenization of sputtering metallic precursors with elemental Se vapor in closed space. The modified selenization process by fitting data prevented the substantial losses and the formation of voids from the interior of absorbers. Accordingly, adhesion was improved and the grain was enlarged, which could span throughout the entire film from the surface towards the Mo back electrode. In addition, a single-phased CIGS thin film was obtained by this selenization process simultaneously.
机译:通过两阶段生长技术制备蓝闪石CIGS薄膜。该方法基于在封闭空间中用元素硒蒸气控制溅射金属前驱物的硒化。通过拟合数据进行的改进的硒化工艺可防止大量损失,并防止吸收体内部形成空隙。因此,提高了粘附力并且增大了晶粒,该晶粒可以从表面到Mo背电极跨越整个薄膜。另外,通过该硒化处理同时获得单相CIGS薄膜。

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