Flexible mono- and multilayer micro grinding tools for ultra-high precision processing and micro machining

摘要

In this investigation, we report about the concept and the novel production process of mono- and multilayer micro grinding tools combining photolithography and joining technology. Main points of the investigation, in addition to the production process, are the achievable surface quality and the process reliability. The use and combination of analytical instruments, such as scanning electron microscopy with elemental analysis ensure the characterization of the defined properties.