Large stroke ultra-precision planar stage based on compliant mechanisms with polynomial flexure hinge design

摘要

Precision stages based on compliant mechanisms have many advantages over conventional linear guides. Therefore they are widely used in many applications in precision engineering, measurement technology, semiconductor industry and space technology. The motion range of high-precise compliant mechanisms is often limited to some micrometres up to submillimetre. This contribution presents the development in the design of a compliant mechanism allowing a bidirectional planar motion with a large stroke of up to 10 mm and a straight line deviation of only a few micrometres. Based on the outstanding reproducibility of the path of motion, positioning and measurement of large objects with accuracy in the nanometre range have been realised.