A novel vibration- and magnetic field-assisted polishing (VMAP) method for microstructured surface finishing

摘要

In order to polish microstructured surface without deteriorating the profile of microstructures, a new vibration- and magnetic field-assisted polishing (VMAP) method is proposed. In this method, magnetic force guarantees that the magnetic abrasives can well contact the microstructured surface and access the corners of microstructures while vibration produces a relative movement between microstructures and abrasives. As the vibration direction is parallel to the microstructures, the profile of the microstructures will not deteriorate. The feasibility of this method was experimentally verified and the results show that after polishing a mirror surface finish was obtained while the profile of rectangular microstructures was well maintained.