Reference areal surface metrology by high speed metrological large range AFM

摘要

A new idea of reference areal surface metrology is presented. Unlike the conventional calibration procedures where a certain set of characterised parameters are usually focused, the reference areal surface metrology mentioned here is to provide accurate and traceable reference 3D data maps of surfaces. By correlating the reference 3D data sets and the 3D data sets of tools under calibration, it is potential to comprehensively characterise the tools, particularly its probe sample interaction and spectrum properties of tools. To meaningfully compare two data sets in the same spectrum window, they must be measured with the same measurement range and pixel density. A high speed metrological large range atomic force microscope (Met. LR-AFM) is developed, optimised and investigated for realising the proposed reference areal surface metrology. Finally its applications are demonstrated by calibrating several optical areal surface measurement tools.