Design of 4' high spatial resolution interferometer

摘要

The goal of this 4" phase shifting Fizeau interferometer design is to measure the small scale deformations of the optical surface down to 0.1 millimeter in 100 millimeter diameter. In this paper, the factors of affecting the wavefront information testing in medium and high frequencies are analyzed. The general description of the 4" high spatial resolution interferometer is provided and the design of the major optical components in the interferometer is described Finally, the interferograms of such kind of high spatial resolution interferometer producing are showed, and the last result is analyzed.