COHERENCE SCANNING INTERFEROMETER AND METHOD FOR OPTICALLY MEASURING HEIGHT SHAPE OF OBJECT IN SPATIAL RESOLUTION ENABLED STATE

摘要

PROBLEM TO BE SOLVED: To improve reproducibility of measurement accuracy and measuring characteristics in a coherence scanning interferometer and a method for measuring a height shape of an object by using the coherence scanning interferometer.;SOLUTION: The coherence scanning interferometer includes a light source 2, an interferometer, a route length changing unit, and a camera 3 having a detection surface. The route length changing unit is configured to change optical lengths of a measurement beam and a reference beam. The route length changing unit includes a route scale 11 and a route detector 12. The route scale 11 and the route detector 12 are configured so that synchronous movement of the route detector 12 is performed relatively to the route scale 11 when the route length changing unit changes an optical path length of the measurement beam or that of the reference beam, or changes the optical path lengths of both the measurement beam and the reference beam.;COPYRIGHT: (C)2013,JPO&INPIT