Improved homodyne laser interferometer used in micro-vibration analysis

摘要

The use of homodyne interferometers has been limited to vibration measurements at objects with high surface reflectivity. This paper presents the modification of a homodyne Michelson laser interferometer that has been designed for vibration analysis at objects with industrial rough surfaces. High linearity, wide measurement range and low measurement uncertainty are the main features of this system. Experiments on an atomic force microscope (AFM) demonstrate the capability of the system.