新型零差激光干涉仪测量误差因素分析

摘要

The measurement principle of novel homodyne laser interferometer is described The measurement errors of the interferometer caused by fringe width, laser intensity and speckle effect are studied through experiment and theoretical analysis. The results show that the fringe width has little influence on the measured values of the amplitude, and the measurement error is 0. 5%. The amplitude measurement error caused by laser intensity changes is 0.5% ,and less light will increase measurement error. The amplitude measurement error caused by speckle effect depends on lens parameters, and the measurement error is 0.4% . The novel homodyne laser interferometer can effectively reduce the requirement of the measurement environment in the vibration system.%介绍了新型零差激光干涉仪的测量原理,实验和理论分析了干涉条纹宽度、激光光强、散斑效应对该激光干涉仪测量误差的影响.结果表明,干涉条纹宽度对振幅测量值影响并不明显,测量误差为0.5％；光强变化引起的振幅测量误差为0.5％,光强较弱会增大测量误差:散斑效应引起的振幅测量误差与透镜参数有关,测量误差为0.4％.该新型零差激光干涉仪可有效降低测振系统对测量环境的要求.