Research on micro-vibration measurement by a laser diode self-mixing interferometer

摘要

The self-mixing vibration signals are observed in the laser diode when the optical beam is back-scattered into the laser cavity which causes laser output power modulated. Based on these properties, a laser diode self-mixing vibrometer with wide dynamic range is proposed. This current investigation further reports new work to improve the accuracy and range of the measured vibration signals. Numerical simulations and experimental results are given and discussed. The experimental results show that the frequency measurement range can be achieved up to 22 kHz with 0.241% maximum relative error while utilizing the reflecting film. For amplitude measurement utilizing the same reflecting film, the error of measurement result is 4.77 nm which has approached nanometer order of magnitude.