Digital realization of precision surface defect evaluation system

摘要

The automatic inspection of surface imperfections of precise elements is a durable problem expected to be solved. These goals require the use of objective methods to automatic inspection of surface imperfections. Based on the defects image which are light in dark background in scattering imaging system, a complete digital evaluation system of surface imperfections, is presented in this paper. Using the XY- scanning system to detect sub-aperture, digital image could be stitched based on isometric serial images. Implementing binary image segmentation and marginal test, feature extraction by using erosion and dilation algorithm was studied. In this system, the lateral resolution is approximately 1μm. The results provide theoretical and practical evidence to establish the precise surface imperfections evaluation system