Surface defect evaluation apparatus, surface defect inspection system, and surface defect inspection method

摘要

PROBLEM TO BE SOLVED: To improve a detection rate, and make it possible to measure a front surface defect dimension of a level to be described in a testing record, in a front surface defect testing.SOLUTION: According to an embodiment, a front surface evaluation device 400 comprises: an input unit 410 that receives a two-dimensional image of appearance of an object acquired by an image acquisition unit 110 and targeted for testing, and a three-dimensional shape of the object measured by a shape measurement unit 120 as an input; and a computation unit 320 that acquires information about a front surface defect existing in a front surface of the object on the basis of image data serving as information about the acquired two-dimensional image, and shape data serving as information about the measured three-dimensional shape.SELECTED DRAWING: Figure 1