SURFACE DEFECT INSPECTION DEVICE, SURFACE DEFECT INSPECTION METHOD, AND SURFACE DEFECT INSPECTION PROGRAM

摘要

PROBLEM TO BE SOLVED: To highly precisely detect a defect in an inspection object, by detecting fluctuation of a relative distance between a one-dimensional imaging means and the inspection object by the one-dimensional imaging means.;SOLUTION: This device/method is provided with: a line light source for irradiating the rotating inspection object with a pattern light having fringes different in brightnesses along a diagonal direction of a sub-scanning direction; a line sensor for imaging the inspection object one-dimensionally along a main scanning direction by a light reflected from the inspection object of the irradiated pattern light; a phase detecting part for detecting a change of a phase in the brightness on a picked-up line image; and an imaging position control part for controlling a position of the line sensor to keep constant a relative distance between the inspection object and the line sensor, based on the change of the phase.;COPYRIGHT: (C)2007,JPO&INPIT