AN OVERVIEW OF MMICS AND MEMS CIRCUITS

摘要

This paper presents the recent development in the design and implementation of monolithic microwave integrated circuits (MMICs) · and Micro-Electro-Mechanical Systems (MEMS). Also it aims to introduce the recent applications of MMIC and MEMS (especially in RF and optical fields) and the future challenges in MMIC, MEMS and MOEMS.