With a complete performance investigation of the on-chip micromachined inductor with mechanical disturbances using ANSYS and HFSS simulators, an optimum structural design of the micromachined spiral inductors with fully CMOS compatible post-processes for RFIC applications is proposed in this paper. Via the incorporation of a sandwich dielectric membrane (0.7 μm SiO2/ 0.7 μm Si3N4/ 0.7 μm TEOS) to enhance the structural rigidity, the inductor can have better signal stability. As compared, the new design of a 5nH micromachined inductor can have less than 45% inductance variation than the conventional one while both devices operate at 8GHz but with 10 m/sec2 acceleration. Meanwhile, using a cross shape instead of blanket membrane can also effectively eliminate the inductance variation induced by the working temperature change (20° C to 75° C). It's our belief that the new micromachined inductors can have not only high Q performance but also better signal stability suitable for wide range RFIC applications.
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机译:通过使用ANSYS和HFSS仿真器对具有机械干扰的片上微机械电感器进行完整的性能研究,提出了针对RFIC应用的具有完全CMOS兼容后处理的微机械螺旋电感器的最佳结构设计。通过掺入三明治介电膜(0.7μmSiO 2 sub> / 0.7μmSi 3 sub> N 4 sub> / 0.7μmTEOS)来增强结构刚性好,电感器可以具有更好的信号稳定性。相比之下,新设计的5nH微加工电感器的电感变化比传统电感器小45%,而两种器件均在8GHz下工作,但加速度为10 m / sec 2 sup>。同时,使用十字形代替毯状膜也可以有效消除工作温度变化(20°C至75°C)引起的电感变化。我们相信,新型微机械电感器不仅具有较高的Q性能,而且还具有适合宽范围RFIC应用的更好的信号稳定性。
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