Experimental Investigation of Surface Properties of Particles and Their Effects on Cu CMP

摘要

The surface properties of nanoabrasive particles have profound influence on CMP performance. In this study, we investigated the correlation between surface properties and the frictional behavior of some silica particles under various oxidizing conditions. More specifically, the friction and wear of copper surface against a polyurethane pad have been measured in the presence of slurries that contained these abrasive particles and were formulated for Cu CMP. The surface qualities and wear mechanisms were then investigated under the scanning electron microscope. The experimental results indicated that the frictional force is not only a function of the particle surface property but also a function of the extent of copper surface modification. In this presentation, experimental design and results will be first presented. The implication of this study to the design of copper CMP slurry will also be discussed.