Hierarchical GDSII-based fracturing and job deck system

摘要

We describe a mask data preparation (MDP) flow using GDSII data. We describe why this flow is minimally disruptive, flexible, and efficient. The mask floor-planning composition can be stored in GDSII so that all layout data is in the same format. We describe how GDSII data can be hierarchically fractured. We use a technique involving the optimal determination of "cover cells". Use of cover cell placements allows a large reduction in runtime and data volume. In one case, we fractured a very large design with assist bars and OPC to a 28 GB MEBES mode 5 file. After application of cover cells, the same data fractures to roughly 360 MB ― a reduction of more than 75x.