A Study of the Use of the Planar Encoder System for the Geometric Error Tests of CNC Machine Tools

机译：平面编码器系统在数控机床几何误差测试中的应用研究

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In this paper, a new product for a semi-conductor manufacturing device, a planar encoder system, is introduced for geometric error test of a CNC machine tool. The principle of the application is described. For the geometric error test, 12 specified test paths are provided to calibrate the 21 error components. Selection of test path is possible for identified error component.

机译：本文介绍了一种用于半导体制造设备的新产品，即平面编码器系统，该产品可用于CNC机床的几何误差测试。描述了应用程序的原理。对于几何误差测试，提供了12条指定的测试路径以校准21个误差分量。对于已识别的错误组件，可以选择测试路径。

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来源
《Instrumentation Science and Technology Vol.3》|2002年|p.433-439|共7页
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作者
Wen-yuh Jywe; Lih-horng Shyu; Kuang-Chyi Lee;
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正文语种
中图分类机械、仪表工业;
关键词
planar encoder system; contouring test; geometric error; CNC machine tool; calibration;

机译：平面编码器系统;轮廓测试;几何误差;数控机床;校准;

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4. A Study of the Use of the Planar Encoder System for the Geometric Error Tests of CNC Machine Tools [C] . International Symposium on Precision Mechanical Measurement: (Preliminary Program of ISIST'2002) Vol.4 Aug 11-16, 2002 Hefei, China . 2002

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A Study of the Use of the Planar Encoder System for the Geometric Error Tests of CNC Machine Tools

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